Devices based on semiconductor nanowires

D. Erts, R. Meija, P. Birjukovs, J. Andzane, M. Studers, R. Löhmus, J. D. Holme

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


Recently, nanoelectromechanical systems (NEMS) have attracted much attention due to their unique properties and possible applications that differ greatly from those of microelectromechanical systems. NEMS operating frequencies may achieve giga- and terahertz levels and their power consumption and heat capacity is extremely low. Moreover, integration levels may reach 10 12 devices per cm-2. In this review, we present techniques for integrating semiconductor materials in NEMS. In particular, we examine fabrication, structure, properties and potential applications of two main classes of NEMS, namely, resonators and switches.

Original languageEnglish
Title of host publication2009 International Semiconductor Conference, CAS
Subtitle of host publicationProceedings
PublisherIEEE Electron Devices Society
Number of pages11
ISBN (Print)9781424444137
Publication statusPublished - 2009
Externally publishedYes
Event2009 International Semiconductor Conference - Sinaia, Romania
Duration: 12 Oct 200914 Oct 2009

Publication series

NameProceedings of the International Semiconductor Conference, CAS


Conference2009 International Semiconductor Conference
Abbreviated titleCAS 2009
Internet address


  • Nanoelectromechanical systems
  • Resonator
  • Semiconductor
  • Switch

Field of Science*

  • 1.3 Physical sciences
  • 2.5 Materials engineering

Publication Type*

  • 3.1. Articles or chapters in proceedings/scientific books indexed in Web of Science and/or Scopus database


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