@inproceedings{e87009f217614fd793a9b1d17fcab014,
title = "Devices based on semiconductor nanowires",
abstract = "Recently, nanoelectromechanical systems (NEMS) have attracted much attention due to their unique properties and possible applications that differ greatly from those of microelectromechanical systems. NEMS operating frequencies may achieve giga- and terahertz levels and their power consumption and heat capacity is extremely low. Moreover, integration levels may reach 10 12 devices per cm-2. In this review, we present techniques for integrating semiconductor materials in NEMS. In particular, we examine fabrication, structure, properties and potential applications of two main classes of NEMS, namely, resonators and switches.",
keywords = "Nanoelectromechanical systems, Resonator, Semiconductor, Switch",
author = "D. Erts and R. Meija and P. Birjukovs and J. Andzane and M. Studers and R. L{\"o}hmus and Holme, {J. D.}",
year = "2009",
doi = "10.1109/SMICND.2009.5336616",
language = "English",
isbn = "9781424444137",
volume = "1",
series = "Proceedings of the International Semiconductor Conference, CAS",
publisher = "IEEE Electron Devices Society",
pages = "37--47",
booktitle = "2009 International Semiconductor Conference, CAS",
address = "United States",
note = "2009 International Semiconductor Conference, CAS 2009 ; Conference date: 12-10-2009 Through 14-10-2009",
}