Fabrication and Characterization of Double- and Single-Clamped CuO Nanowire Based Nanoelectromechanical Switches

Liga Jasulaneca, Alexander I. Livshits, Raimonds Meija, Jelena Kosmaca, Raitis Sondors, Matiss M. Ramma, Daniels Jevdokimovs, Juris Prikulis, Donats Erts (Coresponding Author)

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)
9 Downloads (Pure)


Electrostatically actuated nanoelectromechanical (NEM) switches hold promise for operation with sharply defined ON/OFF states, high ON/OFF current ratio, low OFF state power consumption, and a compact design. The present challenge for the development of nanoelectromechanical system (NEMS) technology is fabrication of single nanowire based NEM switches. In this work, we demonstrate the first application of CuO nanowires as NEM switch active elements. We develop bottom-up and top-down approaches for NEM switch fabrication, such as CuO nanowire synthesis, lithography, etching, dielectrophoretic alignment of nanowires on electrodes, and nanomanipulations for building devices that are suitable for scalable production. Theoretical modelling finds the device geometry that is necessary for volatile switching. The modelling results are validated by constructing gateless double-clamped and single-clamped devices on-chip that show robust and repeatable switching. The proposed design and fabrication route enable the scalable integration of bottom-up synthesized nanowires in NEMS.

Original languageEnglish
Article number117
Pages (from-to)1-14
Issue number1
Publication statusPublished - Jan 2021
Externally publishedYes


  • Bottom-up
  • CuO
  • Nanoelectromechanical switch
  • Nanowires
  • NEMS

Field of Science*

  • 1.4 Chemical sciences
  • 2.4 Chemical engineering
  • 2.10 Nano-technology

Publication Type*

  • 1.1. Scientific article indexed in Web of Science and/or Scopus database


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